Photoelectric conversion device, method of manufacturing the same, and camera

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United States of America Patent

PATENT NO 10340400
APP PUB NO 20180166591A1
SERIAL NO

15825443

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Abstract

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A photoelectric conversion device has a silicon substrate which includes a first portion configured to perform photoelectric conversion, and a second portion which is arranged farther apart from a light receiving surface of the silicon substrate than the first portion and contains carbon. A first peak concentration as a carbon peak concentration in the second portion is not less than 1×1018 [atoms/cm3] and not more than 1×1020 [atoms/cm3], and a second peak concentration as an oxygen peak concentration in the second portion is not less than 1/1000 and not more than 1/10 of the first peak concentration.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaneda, Tasuku Kawasaki, JP 8 21
Ogawa, Toshiyuki Abiko, JP 61 830
Shoyama, Toshihiro Kawasaki, JP 13 31
Takakusagi, Hiroshi Atsugi, JP 9 28

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