Microfabricated optical apparatus with grounded metal layer

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United States of America Patent

PATENT NO 10050409
APP PUB NO 20180166850A1
SERIAL NO

15894170

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Abstract

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A microfabricated optical apparatus that includes a light source driven by a waveform, wherein the waveform is delivered to the light source by at least one through silicon via. The microfabricated optical apparatus may also include a light-sensitive receiver which generates an electrical signal in response to an optical signal. The electrical signal may be communicated to external devices by at least one additional through silicon via, and the signals routed to the encapsulated devices by metal traces. The vias may couple a ground plane to a metal trace layer at intervals, effectively quashing the ability of the bondline to interfere with the absorbed or radiated signal frequency.

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Patent Owner(s)

  • INNOVATIVE MICRO TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gudeman, Christopher S Lompoc, US 51 399

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