Method for etching multilayer film

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United States of America Patent

PATENT NO 10790152
APP PUB NO 20180190500A1
SERIAL NO

15740394

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Abstract

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In a method for etching a multilayer film of a target object by using a plasma processing apparatus, the multilayer film of the target object includes a layer made of a metal magnetic material and a mask is provided on the multilayer film. The multilayer film is etched in a state where a pressure in a processing chamber of the plasma processing apparatus is set to a first pressure that is a relatively high pressure. Subsequently, the multilayer film is further etched in a state where the pressure in the processing chamber is set to a second pressure lower than the first pressure.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kang, Song yun Tokyo, JP 22 186
Kubo, Takuya Tokyo, JP 38 100
Morimoto, Tamotsu Yamanashi, JP 34 266

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