TFT array substrate, manufacturing method thereof, and liquid crystal display apparatus
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United States of America Patent
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Jul 20, 2016
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Jun 21, 2016
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Abstract
The present disclosure discloses a TFT array substrate, a manufacturing method thereof and a liquid crystal display apparatus. The TFT array substrate comprising: a substrate; and a TFT disposed on the substrate; the TFT comprises a semiconductor layer and both a source electrode and a drain electrode disposed on the semiconductor layer, and wherein a contact surface between the semiconductor layer and the source electrode and/or a contact surface between the semiconductor layer and the drain electrode are uneven structure. Through above manner, the present disclosure can reduce contact resistance between the semiconductor layer and the metal layer and can improve electrical characteristic of TFT apparatus.
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