Statistical analysis in X-ray imaging

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United States of America Patent

PATENT NO 10685759
APP PUB NO 20180204647A1
SERIAL NO

15407098

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of analyzing a specimen using X-rays, comprising the steps of:

    Irradiating the specimen with input X-rays;Using a detector to detect a flux of output X-rays emanating from the specimen in response to said irradiation,which method further comprises the following steps:Using the detector to intercept at least a portion of said flux so as to produce a set {Ij} of pixeled images Ij of at least part of the specimen, whereby the cardinality of the set {Ij} is M>1.For each pixel pi in each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}.Using the set {Sij} to calculate the following values: A mean signal strength S per pixel position i;A variance σ2S in S per pixel position i. Using these values S and σ2S to produce a map of mean X-ray photon energy E per pixel.

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Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124-5793

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fullagar, Wilfred Kelsham Weetangera, AU 1 2
Kingston, Andrew Maurice Kambah, AU 8 94
Myers, Glenn Robert Waramanga, AU 3 8
Paziresh, Mahsa Acton, AU 2 3
Varslot, Trond Karsten Vuku, NO 13 102

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