Blind-vented electrode

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United States of America Patent

PATENT NO 10256003
APP PUB NO 20180218800A1
SERIAL NO

15420611

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Abstract

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A vented electrode that provides a directional stop to prevent energetic particles and secondaries (i.e., secondary electrons, charged particles, photons) generated in the vent channel from reaching into a gap outside of the electrode plate. For example, ventilation is added to at least one electrode, via vented inserts, wherein the vents do not provide a direct line of sight from at least one side of the electrode plate to the other.

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Patent Owner(s)

Patent OwnerAddress
PLANSEE JAPAN LTD3-14-16 NAKATAKITA IZUMI-KU YOKOHAMA 245-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shirozu, Noboru Fukuoka, JP 1 0

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