VIBRATION DAMPING MOUNT

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United States of America Patent

APP PUB NO 20180252739A1
SERIAL NO

15904500

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A MEMS sensor package includes a MEMS sensor fixed to a vibration damping mount. The mount includes a silicon substrate defining an outer frame; a moveable support to which the MEMS sensor is fixed; and a vibration damping structure connected between the outer frame and the moveable support to damp movement of the support. The MEMS sensor and vibration damping mount are enclosed by a casing that is backfilled with gas.

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Patent Owner(s)

Patent OwnerAddress
ATLANTIC INERTIAL SYSTEMS LIMITEDCLITTAFORD ROAD SOUTHWAY PLYMOUTH DEVON PL6 6DE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MALVERN, Alan Plymouth, GB 15 49

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