DROPLET EJECTING APPARATUS, DROPLET EJECTING METHOD, AND COMPUTER STORAGE MEDIUM

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United States of America Patent

APP PUB NO 20180257101A1
SERIAL NO

15911375

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KAKINO, Akira Kumamoto, JP 3 8
MIYAZAKI, Kazuhito Kumamoto, JP 7 52
YOSHITOMI, Wataru Kumamoto, JP 4 7

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