SENSING SYSTEM, SENSING WAFER, AND PLASMA PROCESSING APPARATUS
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United States of America Patent
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Sep 13, 2018
app pub date -
Sep 14, 2017
filing date -
Sep 14, 2017
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Abstract
According to one embodiment, a sensing system includes a waveguide, an optical system, and a detector. The waveguide is configured to guide light in a wafer. The optical system is configured to cause the light guided by the waveguide to go out from a back side of the wafer. The detector is configured to detect a state inside or outside the wafer based on a detection result about the light caused to go out by the optical system.
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