System and method for controllable non-volatile metal removal

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10633743
APP PUB NO 20180265988A1
SERIAL NO

15980953

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A system and method for removing metal from a substrate in a controlled manner is disclosed. The system includes a chamber, with one or more gas inlets to allow the flow of gasses into the chamber, at least one exhaust pump, to exhaust gasses from the chamber, and a heater, capable of modifying the temperature of the chamber. In some embodiments, one or more gasses are introduced into the chamber at a first temperature. The atoms in these gasses chemically react with the metal on the surface of the substrate to form a removable compound. The gasses are then exhausted from the chamber, leaving the removable compound on the surface of the substrate. The temperature of the chamber is then elevated to a second temperature, greater than the sublimation temperature of the removable compound. This increased temperature allows the removable compound to become gaseous and be exhausted from the chamber.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCGLOUCESTER MA 01930

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anthis, Jeffrey W San Jose, US 89 4744
Chen, Tsung-Liang Danvers, US 49 178
Gilchrist, Glen Danvers, US 10 19
Schmiege, Benjamin Santa Clara, US 29 1415

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 28, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 28, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00