SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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United States of America Patent
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Issued Date -
Sep 20, 2018
app pub date -
Sep 11, 2017
filing date -
Sep 11, 2017
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Abstract
According to an embodiment, a substrate treatment apparatus includes a noble metal-containing member having a concave-convex surface including a noble metal, and a liquid chemical supply member to supply a liquid chemical. While convex portions of the concave-convex surface are contact with a predetermined surface of a metal, the liquid chemical is supplied onto the surface of the metal to remove the metal with etching.
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