COATING APPARATUS AND COATING METHOD
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United States of America Patent
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Issued Date -
Sep 27, 2018
app pub date -
Mar 26, 2018
filing date -
Mar 26, 2018
priority date (Note) -
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Abstract
Disclosed are a coating apparatus and a coating method. The coating apparatus includes a chamber, a support located in an interior space of the chamber and configured to support a substrate which is to be coated, an ejection nozzle configured to eject a coating material toward the support, and an electric field forming unit configured to form an electric field in a movement path of the coating material to provide kinetic energy for the coating material.
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