Linked micromechanical positioning apparatus for real-time testing and measurement
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United States of America Patent
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Issued Date -
Sep 27, 2018
app pub date -
Oct 13, 2015
filing date -
Oct 13, 2015
priority date (Note) -
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Abstract
The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).
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