Piezoelectric thin film resonator, filter, and multiplexer

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United States of America Patent

PATENT NO 10790799
APP PUB NO 20180294794A1
SERIAL NO

15917474

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Abstract

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A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; lower and upper electrodes facing each other across the piezoelectric film; a mass load film that is located at least one of a first side, which is closer to the upper electrode, of the piezoelectric film and a second side, which is closer to the lower electrode, of the piezoelectric film, separated from the upper and lower electrodes, and surrounds in plan view a resonance region at least in part, the lower and upper electrodes facing each other across the piezoelectric film in the resonance region; and an acoustic reflection layer that includes the resonance region and the mass load film in plan view, is located in or on the substrate, and includes an air gap or an acoustic mirror in which at least two layers with different acoustic characteristics are stacked.

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Patent Owner(s)

  • TAIYO YUDEN CO. LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Jiansong Tokyo, JP 45 111
Nishihara, Tokihiro Tokyo, JP 120 1661

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