Dynamic response analysis prober device

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United States of America Patent

PATENT NO 10782340
APP PUB NO 20180299504A1
SERIAL NO

15737966

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a prober device that shapes an input waveform of a dynamic electric signal to be input to one of probes, and observes an output waveform of the dynamic electric signal output through a sample, or preferably shapes the input waveform such that the output waveform of the dynamic electric signal output through the sample becomes approximately a pulse shape, when a response analysis of a dynamic signal is performed with respect to a fine-Structured device. With this, the response analysis of a high-speed dynamic signal equal to or greater than a megahertz level can be performed with respect to the fine-Structured device such as a minute transistor configuring an LSI.

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Patent Owner(s)

  • HITACHI HIGH-TECH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Komori, Masaaki Tokyo, JP 19 161
Mizuno, Takayuki Tokyo, JP 81 563
Nara, Yasuhiko Tokyo, JP 49 556
Oki, Katsuo Tokyo, JP 4 8

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