Electron microscope
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United States of America Patent
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Apr 30, 2019
Grant Date -
Oct 18, 2018
app pub date -
Apr 13, 2018
filing date -
Apr 14, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
An electron microscope includes a monochromator, an image acquiring portion for obtaining an electron microscope image containing interference fringes of the electron beam formed by an aperture located behind the monochromator, a line profile acquiring portion for obtaining a plurality of line profiles passing through the center of the aperture on the EM image, an energy dispersion direction identifying portion for identifying the direction of energy dispersion of the monochromator on the basis of the line profiles obtained by the line profile acquiring portion, and an optics controller for controlling an optical system on the basis of a line profile in the direction of energy dispersion to bring the focal plane for the electron beam exiting from the monochromator into coincidence with the achromatic plane.
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