Importance

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Abstract

The present invention provides a method for producing a glass with a fine structure, the method being capable of avoiding forming a hole with a shallow wall angle and capable of producing a glass with a fine structure such as a deep hole or groove extending with high straightness in the thickness direction of a substrate. The present invention relates to a method for producing a glass with a fine structure, the method including an etching step of etching a glass by irradiating the glass with an ultrasonic wave, wherein: an etchant used in the etching step includes hydrofluoric acid, at least one inorganic acid selected from the group consisting of nitric acid, hydrochloric acid, and sulfuric acid, and a surfactant; and in the etchant, a concentration of the hydrofluoric acid is 0.05 mass % to 8.0 mass %, a concentration of the inorganic acid is 2.0 mass % to 16.0 mass %, and a content of the surfactant is 5 ppm to 1000 ppm.

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First Claim