Gate cut with integrated etch stop layer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10665589
APP PUB NO 20180350810A1
SERIAL NO

16054417

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of forming a power rail to semiconductor devices comprising removing a portion of the gate structure forming a gate cut trench separating a first active region of fin structures from a second active region of fin structures. A conformal etch stop layer is formed in the gate cut trench. A fill material is formed on the conformal etch stop layer filling at least a portion of the gate cut trench. The fill material has a composition that is etched selectively to the conformal etch stop layer. A power rail is formed in the gate cut trench. The conformal etch stop layer obstructs lateral etching during forming the power rail to substantially eliminate power rail to gate structure shorting.

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Patent Owner(s)

  • TESSERA, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bergendahl, Marc A Troy, US 98 1156
Greene, Andrew M Albany, US 118 475
Venigalla, Rajasekhar Hopewell Junction, US 88 984

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