ETCHANT COMPOSITION AND FORMING METHOD OF WIRING USING ETCHANT COMPOSITION
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United States of America Patent
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Dec 27, 2018
app pub date -
May 4, 2018
filing date -
May 4, 2018
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Abstract
A phosphoric acid-free etchant composition and a method of forming a wiring, the composition including about 40 wt % to about 60 wt % of an organic acid compound; about 6 wt % to about 12 wt % of a glycol compound; about 1 wt % to about 10 wt % of nitric acid, sulfuric acid, or hydrochloric acid; about 1 wt % to about 10 wt % of a nitrate salt compound; and water, all wt % being based on a total weight of the phosphoric acid-free etchant composition.
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