ULTRAVIOLET RADIATION APPARATUS
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United States of America Patent
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Issued Date -
Mar 14, 2019
app pub date -
Nov 9, 2017
filing date -
Nov 9, 2017
priority date (Note) -
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Abstract
The present disclosure provides an ultraviolet (UV) radiation apparatus, where the UV radiation apparatus includes a chamber containing substrates, a sample stage supporting the substrates, UV lamps emitting UV light arranged opposite to the sample stage, and a mirror reflective structure arranged in the chamber. The sample stage is positioned at a top of the chamber or a bottom of the chamber. The mirror reflective structure includes protrusions or recesses that are orderly arranged; the protrusions or the recesses reflect the UV light along all directions and the UV light is irradiated on the mirror reflective structure.
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