DEVELOPED INTRINSIC TWO-WAY SHAPE MEMORY THIN FILM
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United States of America Patent
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Mar 21, 2019
app pub date -
Sep 18, 2017
filing date -
Sep 18, 2017
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Abstract
NiTi thin films with composition gradient have the added feature of an intrinsic two-way shape memory effect. According to the invention, a method of fabrication of Ni-rich/(NiTiCu) Ti-rich bi-layer thin film is disclosed. The bi-layer thin film formed compositional gradients at the interface of the films through diffusion. The bi-layer presented a combined pseudo elastic behavior and shape memory effect with a reduced hysteresis. The combination of pseudo elastic with shape memory effect produces an intrinsic two-way shape memory effect (TWSME). This behavior achieved without needing complicated heat treatment and training process. Therefore, it is compatible with MEMS processing.
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