THERMALLY CONDUCTIVE INSULATOR
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United States of America Patent
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Mar 21, 2019
app pub date -
Mar 9, 2018
filing date -
Mar 9, 2018
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Abstract
A thermally conductive insulator consisting essentially of a silicon nitride member, comprise: a first region provided 10 μm or more away from a first surface of the member along a depth direction in a section vertical to the first surface and containing at least one substance selected from the group consisting of silicon carbide and a carbon material; and a second region provided between the first surface and the first region. A concentration of silicon nitride of the second region is higher than a concentration of silicon nitride of the first region.
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