Photoetching mask plate, manufacture method thereof, and photoetching method

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United States of America Patent

PATENT NO 10466584
APP PUB NO 20190094681A1
SERIAL NO

15533456

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure provides a photoetching mask plate, a method for manufacturing the photoetching mask plate, and a photoetching method using the photoetching mask plate. The photoetching mask plate includes a base substrate, a mask pattern arranged on a surface of the base substrate, and a conductive connection pattern arranged on the surface of the base substrate. The conductive connection pattern is configured to electrically connect separate portions of the mask pattern to each other.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTDBEIJING 100015
BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO LTD100176 NO 8 MIDDLE XIHUAN ROAD BEIJING ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE DAXING DISTRICT BEIJING BEIJING CITY BEIJING CITY 100176

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bao, Zhiying Beijing, CN 55 167
Chen, Xi Beijing, CN 903 6756
Jiang, Wenbo Beijing, CN 43 143
Li, Yue Beijing, CN 869 5176
Lv, Zhenhua Beijing, CN 66 211
Wang, Shijun Beijing, CN 123 399
Xiao, Wenjun Beijing, CN 50 127
Xue, Yanna Beijing, CN 52 206
Zhang, Yong Beijing, CN 774 4505

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