Simplified lamp design

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United States of America Patent

PATENT NO 10453670
APP PUB NO 20190096657A1
SERIAL NO

16139596

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ranish, Joseph M San Jose, US 184 5380

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