Physical quantity sensor, inertia measurement device, vehicle positioning device, electronic apparatus, and vehicle
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 26, 2021
Grant Date -
Apr 4, 2019
app pub date -
Sep 27, 2018
filing date -
Sep 29, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A physical quantity sensor includes a substrate, a first sensor element that is positioned on one main surface of the substrate and includes a first fixed portion fixed to the substrate, a second sensor element that is positioned on the one main surface of the substrate and includes a second fixed portion fixed to the substrate, a first recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the first fixed portion in plan view of the substrate, and a second recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the second fixed portion in plan view of the substrate, and in which the first recess portion and the second recess portion are disposed so as to be separated from each other.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully