HYDROXIDE-CATALYSIS BONDING OF OPTICAL COMPONENTS USED IN DUV OPTICAL SYSTEMS

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United States of America Patent

APP PUB NO 20190137656A1
SERIAL NO

16156210

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Abstract

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A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

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Patent Owner(s)

Patent OwnerAddress
CORNING INCORPORATEDSP-TI-03-01 CORNING NY 14831

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dunn, Michael Morgan Palmyra, US 1 0
McMichael, Todd Robert Rochester, US 7 3
Michaloski, Paul Francis Rochester, US 23 55
Westcott, Mark Ranney Rochester, US 2 5

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