HYDROXIDE-CATALYSIS BONDING OF OPTICAL COMPONENTS USED IN DUV OPTICAL SYSTEMS
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United States of America Patent
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May 9, 2019
app pub date -
Oct 10, 2018
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Oct 10, 2018
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Abstract
A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.
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