SiC heater

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10966288
APP PUB NO 20190174578A1
SERIAL NO

16322425

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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This SiC heater includes a heating element having a thin plate-shaped silicon carbide sintered body and an insulating coat film formed on a surface of the silicon carbide sintered body, a pair of electrodes for conducting electricity in the heating element, and a heater base that holds the heating element from one surface side while insulating the heating element from heat from the heating element, the insulating coat film is located on a surface of the silicon carbide sintered body opposite to the heater base, an electrical resistivity at room temperature of the insulating coat film is 109 Ω·cm or more, a thermal expansion coefficient of the insulating coat film is 2×10−6/K or more and 6×10−6/K or less, SiO2 is included as a matrix, 1% by weight or more and 35% by weight or less of a first additive component including at least one of B2O3 and Al2O3 is contained, and 1% by weight or more and 35% by weight or less of a second additive component including at least one of MgO and CaO is contained.

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Patent Owner(s)

  • SUMITOMO OSAKA CEMENT CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Murakami, Yoshihiko Tokyo, JP 6 25
Nagatomo, Hiroaki Tokyo, JP 14 80
Uchikawa, Yuki Tokyo, JP 1 0

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