MICROELECTROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE THROUGH AN ACTUATION OF THE PIEZOELECTRIC TYPE

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United States of America Patent

APP PUB NO 20190196177A1
SERIAL NO

16222027

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20041 AGRATE BRIANZA (MILANO)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BONI, Nicolo' Bergamo, IT 3 0
CARMINATI, Roberto Piancogno (BS), IT 31 33
MERLI, Massimiliano Stradella, IT 5 1

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