Microelectromechanical system (MEMS) structure and method of formation

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United States of America Patent

PATENT NO 10928624
APP PUB NO 20190204586A1
SERIAL NO

16008442

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Abstract

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A microelectromechanical system (MEMS) structure includes at least first and second metal vias. Each of the first and second metal vias includes a respective planar metal layer having a first thickness and a respective post formed from the planar metal layer. The post has a sidewall, and the sidewall has a second thickness greater than 14% of the first thickness.

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Patent Owner(s)

  • AGILENT TECHNOLOGIES TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Martinez, Jose A Murphy, US 10 94

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