COMPONENT FOR FABRICATING SIC SEMICONDUCTOR, HAVING PLURALITY OF LAYERS HAVING DIFFERENT TRANSMITTANCES, AND METHOD FOR MANUFACTURING SAME

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United States of America Patent

APP PUB NO 20190206686A1
SERIAL NO

16325877

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Abstract

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Provided according to an embodiment of the present invention is a component for fabricating an SiC semiconductor, having a plurality of layers having different transmittances, the component comprising two or more superposed layers, wherein each of the superposed layers contains SiC and has a transmittance value different from that of another adjacent layer.

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Patent Owner(s)

Patent OwnerAddress
TOKAI CARBON KOREA CO LTDANSEONG-SI GYEONGGI-DO 17602

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KIM, JOUNG IL SEOUL, KR 8 9

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