High-power radio-frequency spiral-coil filter

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United States of America Patent

PATENT NO 10812033
APP PUB NO 20190207579A1
SERIAL NO

15933213

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Abstract

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Various embodiments include an apparatus to filter radio-frequencies in a plasma-based processing device. In various embodiments, an RF filter device includes a number of substantially-planar spiral-filters electrically coupled to and substantially parallel to each other in a spaced-apart arrangement. In one embodiment, each of the planar spiral-filters is coupled to an adjacent one of the planar spiral filters as either an inside-to-inside electrical connection or an outside-to-outside electrical connection based on an arrangement of the successive spirals so as to increase a total value of inductance. Other methods, devices, apparatuses, and systems are disclosed.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Augustino, Jason Livermore, US 18 305
Benjamin, Neil Martin Paul Palo Alto, US 28 519
Jafarian-Tehrani, Seyed Jafar Fremont, US 28 499
Mopidevi, Hema Swaroop Fremont, US 12 27
O'Brien, Sean Kelly Pleasanton, US 1 2

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