Scanning probe nanotomograph comprising an optical analysis module

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United States of America Patent

PATENT NO 11150266
APP PUB NO 20190219608A1
SERIAL NO

16302153

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Abstract

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The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus.

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Patent Owner(s)

  • PRIVATE INSTITUTION "NAZARBAYEV UNIVERSITY RESEARCH AND INNOVATION SYSTEM&QUOT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alekseev, Alexander Mihaylovich Astana, KZ 3 1
Efimov, Anton Evgenievich Moscow, RU 3 1
Sokolov, Dmitry Yurjevich Moscow, RU 3 1
Volkov, Aleksey Dmitrievich Astana, KZ 3 1

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