Electro-optical phase modulator
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United States of America Patent
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Oct 6, 2020
Grant Date -
Jul 18, 2019
app pub date -
Jan 14, 2019
filing date -
Jan 15, 2018
priority date (Note) -
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Abstract
An electro-optical phase modulator includes a waveguide made from a stack of strips. The stack includes a first strip made of a doped semiconductor material of a first conductivity type, a second strip made of a conductive material or of a doped semiconductor material of a second conductivity type, and a third strip made of a doped semiconductor material of the first conductivity type. The second strip is separated from the first strip by a first interface layer made of a dielectric material, and the third strip is separated from the second strip by a second interface layer made of a dielectric material.
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