FINE STRUCTURE, METHOD FOR MANUFACTURING THE SAME, AND OPTICAL INSTRUMENT

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United States of America Patent

APP PUB NO 20190257982A1
SERIAL NO

16277001

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Abstract

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Provided are a fine structure which has water resistance, moisture resistance, and an antifouling property and achieves improvement in long-term reliability, a method for manufacturing the fine structure, and an optical instrument. A fine structure 1 includes: an element 2 having a lattice 12 formed at a pitch shorter than a wavelength of light in a used bandwidth on a transparent substrate 10; and a water-repellent layer 3 that covers a surface of the element 2, in which the water-repellent layer 3 has a silica layer 13 made of silica and a silane coupling layer 14 made of a silane coupling agent, in this order from a side of the element 2.

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Patent Owner(s)

Patent OwnerAddress
DEXERIALS CORPORATIONGATE CITY OSAKI EAST TOWER 8F 1-11-2 OSAKI SHINAGAWA-KU TOKYO 1410032

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oowada, Masahiro Tokyo, JP 6 5

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