CLEANING METHOD FOR CLEANING FRAME UNIT

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20190270123A1
SERIAL NO

16284575

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A cleaning method for cleaning a frame unit including an affixed object, a tape affixed to an undersurface of the affixed object, and an annular frame to which an outer peripheral portion of the tape is affixed, the cleaning method including: an affixed object cleaning step of cleaning the affixed object by jetting a cleaning liquid from a cleaning nozzle while moving the cleaning nozzle in a reciprocating manner along a path extending from above one end of an outer peripheral edge of the affixed object to above another end of the outer peripheral edge of the affixed object; and a frame cleaning step of cleaning the frame by jetting the cleaning liquid from the cleaning nozzle to the frame.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
AKUTAGAWA, Yukito Tokyo, JP 2 3
SHIRAGA, Kentaro Tokyo, JP 7 7
TSUCHIYA, Toshio Tokyo, JP 31 348

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