CLEANING METHOD FOR CLEANING FRAME UNIT
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United States of America Patent
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Issued Date -
Sep 5, 2019
app pub date -
Feb 25, 2019
filing date -
Mar 2, 2018
priority date (Note) -
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Abstract
A cleaning method for cleaning a frame unit including an affixed object, a tape affixed to an undersurface of the affixed object, and an annular frame to which an outer peripheral portion of the tape is affixed, the cleaning method including: an affixed object cleaning step of cleaning the affixed object by jetting a cleaning liquid from a cleaning nozzle while moving the cleaning nozzle in a reciprocating manner along a path extending from above one end of an outer peripheral edge of the affixed object to above another end of the outer peripheral edge of the affixed object; and a frame cleaning step of cleaning the frame by jetting the cleaning liquid from the cleaning nozzle to the frame.
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