Method for determining the shape of a sample tip for atom probe tomography

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United States of America Patent

PATENT NO 10746759
APP PUB NO 20190277881A1
SERIAL NO

16296068

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Abstract

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The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.

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Patent Owner(s)

Patent OwnerAddress
IMEC VZWLEUVEN LEUVEN FLEMISH BRABANT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fleischmann, Claudia Leuven, BE 2 2
Paredis, Kristof Oud-Heverlee, BE 7 3
Vandervorst, Wilfried Mechelen, BE 31 406

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