Measuring device and operation method of system for inspecting focus ring

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United States of America Patent

PATENT NO 11164729
APP PUB NO 20190279848A1
SERIAL NO

16296704

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Abstract

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A measuring device and method, provided in a region surrounded by a focus ring and configured to measure an amount of consumption of the focus ring, includes a disc-shaped base substrate, sensor electrodes provided on the base substrate, a high frequency oscillator configured to apply a high frequency signal to the sensor electrodes, and an operation unit configured to calculate measurement values indicating electrostatic capacitances of the sensor electrodes from detection values corresponding to potentials of the sensor electrodes. The operation unit calculates a representative value (for example an average value) of the measurement values corresponding to the amount of consumption of the focus ring and derives the amount of consumption of the focus ring with reference to a table in which the amount of consumption of the focus ring is associated with the representative value of the measurement values.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawano, Daisuke Miyagi, JP 7 16
Sugita, Kippei Miyagi, JP 34 1079

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