CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20190283087A1
SERIAL NO

16429470

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A cleaning device for removing contamination on a substrate holder used with an electroplating cell includes an arm, a cleaning agent supplier, a nozzle and a receiver. The cleaning agent supplier is coupled to the arm and configured to supply a cleaning agent. The nozzle is coupled to the cleaning agent supplier and configured to spray the cleaning agent onto the substrate holder to remove the contamination. The receiver is coupled to the arm and configured to receive the cleaning agent after the cleaning agent is sprayed onto the substrate holder.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MFG CO LTDSCIENCE-BASED INDUSTRIAL PARK NO 121 PARK AVENUE 3 HSIN-CHU R O C

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KAO, Chung-En Miaoli County, TW 28 59
LU, Victor Y Foster City, US 27 236
WANG, Yu-Young New Taipei City, TW 8 166

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