Gimbal for CMP tool conditioning disk having flexible metal diaphragm

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United States of America Patent

PATENT NO 10814457
APP PUB NO 20190283215A1
SERIAL NO

15924792

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Abstract

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A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bodensieck, Eric J Schuylerville, US 1 1
Jung, Sung Pyo Loudonville, US 2 15
Koli, Dinesh R Mechanicville, US 9 40
Lee, Sunghoon Rexford, US 102 669
Vincent, Eddy Aldrin Bernard Anak Halfmoon, US 1 1

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