High temperature sputtered stoichiometric amorphous aluminum oxide

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11384421
APP PUB NO 20190284677A1
SERIAL NO

16275556

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for producing a sputtered stoichiometric a-Al2O3 thin film. A substrate is placed into a chamber containing an Al target to be sputtered. The chamber is evacuated to a base pressure of about 7×10−8 Torr or lower and the temperature of the substrate is maintained. With a sputtering shutter in the chamber closed, Ar gas is flowed into the chamber to backsputter the Al target and Ar and O2 gases are flowed into the chamber to presputter the target. The shutter is opened and Al is sputtered onto the substrate in the presence of the Ar and O2 gases to obtain a sputtered a-Al2O3 film on the substrate.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abernathy, Matthew R Washington, US 3 2
Jugdersuren, Battogtokh Alexandria, US 5 4
Liu, Xiao Fairfax, US 162 393
Metcalf, Thomas H Washington, US 5 10

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jan 12, 2026
7.5 Year Payment $3600.00 $1800.00 $900.00 Jan 12, 2030
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jan 12, 2034
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00