Valve device, flow control method using the same, and semiconductor manufacturing method

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United States of America Patent

PATENT NO 11098819
APP PUB NO 20190285176A1
SERIAL NO

16347934

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Abstract

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A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.

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Patent Owner(s)

Patent OwnerAddress
FUJIKIN INCORPORATED3-2 ITACHIBORI 2-CHOME NISHI-KU OSAKA-SHI OSAKA 550-0012

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Funakoshi, Takashi Osaka, JP 15 108
Inada, Toshiyuki Osaka, JP 19 34
Nakata, Tomohiro Osaka, JP 88 294
Shinohara, Tsutomu Osaka, JP 144 928
Yoshida, Toshihide Osaka, JP 31 286

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