Electron beam irradiating device

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United States of America Patent

PATENT NO 10720256
APP PUB NO 20190287693A1
SERIAL NO

16348340

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Abstract

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Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.

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Patent Owner(s)

Patent OwnerAddress
HITACHI ZOSEN CORPORATION7-89 NANKO-KITA 1-CHOME SUMINOE-KU OSAKA-SHI OSAKA 5598559

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Daiku, Hiroyuki Osaka, JP 11 106
Inoue, Norihiro Osaka, JP 9 352
Sakai, Ichiro Osaka, JP 25 364
Terasaka, Yohei Osaka, JP 1 0

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