Etchant composition, and method for manufacturing metal pattern and array substrate using the same

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United States of America Patent

PATENT NO 10910412
APP PUB NO 20190288015A1
SERIAL NO

16356551

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Abstract

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An etchant composition including a persulfate, a four-nitrogen ring compound, a carbonyl ring compound having two or more carbonyl groups, and water, and having a weight ratio of the four-nitrogen ring compound and the carbonyl ring compound of about 1:0.1 to about 1:2. The etchant composition may etch a multilayer of titanium/copper and may be used for manufacturing a metal pattern and an array substrate having excellent properties of an etched pattern.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Shinhyuk Suwon-si, KR 4 0
Kim, Bong-Kyun Hwaseong-si, KR 67 506
Kim, Jinsuek Daejeon, KR 8 35
Lee, Donghee Hwaseong-si, KR 40 137
Shim, Seungbo Asan-si, KR 49 55
Shim, Woonhyung Sejong-si, KR 1 0

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