Dual temperature heater

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11133210
APP PUB NO 20190304825A1
SERIAL NO

16443185

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method and apparatus for positioning and heating a substrate in a chamber are provided. In one embodiment, the apparatus comprises a substrate support assembly having a support surface adapted to receive the substrate and a plurality of centering fingers for supporting the substrate at a distance parallel to the support surface and for centering the substrate relative to a reference axis substantially perpendicular to the support surface. The plurality of the centering fingers are movably disposed along a periphery of the support surface, and each of the plurality of centering fingers comprises a first end portion for either contacting or supporting a peripheral edge of the substrate.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balasubramanian, Ganesh Fremont, US 134 3085
Baluja, Sanjeev Campbell, US 132 3949
Du, Bois Dale R Los Gatos, US 52 2902
Nowak, Thomas Cupertino, US 94 8616
Rocha-Alvarez, Juan Carlos San Carlos, US 215 9020
Yap, Lipyeow Santa Clara, US 7 372
Zhou, Jianhua Campbell, US 135 3222

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