Etchant composition and manufacturing method of metal pattern using the same

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United States of America Patent

PATENT NO 10611962
APP PUB NO 20190322935A1
SERIAL NO

16391222

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Abstract

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An etchant composition is presented. The composition includes: 18 wt % to 25 wt % of a first organic acid compound; 15 wt % to 20 wt % of a second organic acid compound; 8.1 wt % to 9.9 wt % of an inorganic acid compound; 1 wt % to 4.9 wt % of a sulfonic acid compound; 10 wt % to 20 wt % of a hydrogen sulfate salt compound; 1 wt % to 5 wt % of a nitrogen-containing dicarbonyl compound; 1 wt % to 5 wt % of an amino acid derivative compound; 0.1 wt % to 2 wt % of an iron-containing oxidizing agent compound; and a balance amount of water.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Gyu-Po Incheon, KR 9 21
Kim, Jin Seock Seongnam-si, KR 13 14
Kim, Ki Tae Osan-si, KR 315 2263
Lee, Dae-Woo Incheon, KR 71 500
Lee, Sang-Hyuk Incheon, KR 36 538
Park, Jong Hee Yongin-si, KR 19 20
Shin, Hyun-Cheol Incheon, KR 21 110

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