EXHAUST NOZZLE UNIT, LOAD PORT, AND EFEM
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United States of America Patent
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Issued Date -
Oct 24, 2019
app pub date -
Apr 18, 2019
filing date -
Apr 19, 2018
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Abstract
There is provided an exhaust nozzle unit capable of discharging a gas atmosphere in a substrate storage container having a loading/unloading opening from the container to an outside of the container through a port formed on a bottom surface of the container. The exhausted nozzle includes a nozzle capable of switching the port from a closed state to an open state by pressing a valve of the port; and a housing configured to hold the nozzle so as to be movable up and down between a use posture in which the port is in the open state and a standby posture in which the port is in the closed state.
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