Piezoelectric acoustic MEMS transducer and fabrication method thereof

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United States of America Patent

PATENT NO 10623866
APP PUB NO 20190327562A1
SERIAL NO

16389833

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Abstract

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A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.

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Patent Owner(s)

  • SMI STMICROELECTRONICS S.R.L

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adorno, Silvia Novate Milanese, IT 14 59
Cerini, Fabrizio Magenta, IT 10 17
Vercesi, Federico Milan, IT 21 17

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