Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect

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United States of America Patent

PATENT NO 11414318
APP PUB NO 20190330050A1
SERIAL NO

16471378

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Abstract

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Microelectronic structure comprising at least one movable mass that is mechanically connected to a first mechanical element by a first mechanically linking connector and to a second mechanical element (24) by electrically conductive second mechanically linking connector, and a device for electrically biasing the second mechanically linking connector, the second mechanically linking connector being such that they are the seat of a thermo-piezoresistive effect, the second linking connector and the movable mass being placed with respect to each other so that a movement of the movable mass applies a mechanical stress to the second linking connector, wherein the electrically biasing device are DC voltage biasing device and form, with at least the second mechanically linking connector, a thermo-piezoresistive feedback electric circuit.

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Patent Owner(s)

  • COMMISSARIAT A L'ÉNERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVE; SAFRAN ELECTRONICS & DEFENSE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jourdan, Guillaume Grenoble, FR 27 165
Lehee, Guillaume Boulogne Billancourt, FR 10 18

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