Systems and methods for providing getters in microelectromechanical systems

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United States of America Patent

PATENT NO 11945713
APP PUB NO 20190330052A1
SERIAL NO

16504999

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Abstract

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Systems and methods are provided that provide a getter in a micromechanical system. In some embodiments, a microelectromechanical system (MEMS) is bonded to a substrate. The MEMS and the substrate have a first cavity and a second cavity therebetween. A first getter is provided on the substrate in the first cavity and integrated with an electrode. A second getter is provided in the first cavity over a passivation layer on the substrate. In some embodiments, the first cavity is a gyroscope cavity, and the second cavity is an accelerometer cavity.

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Patent Owner(s)

  • INVENSENSE, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Jeff Chunchieh Fremont, US 4 8
Jayaraman, Logeeswaran Veerayah Milpitas, US 10 71
Kim, Bongsang Mountain View, US 30 207
Lee, Daesung San Jose, US 155 2079
Shin, Jongwoo Pleasanton, US 56 760

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